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EC-702 (C) Nano Electronics Notes

5 notes for Nano Electronics, unit by unit.

Unit 1 · Short notes Overview of semiconductor physics Nanoscale band structure and Electron transport · Quantum confinement in semiconductor nanostructures: quantum wells, quantum wires, quantum dots, super-lattices, band offsets, and electronic density of states · Heavily doped semiconductors and low dimensional quantum devices
Unit 2 · Short notes Introduction to lithography Contact, proximity printing and Projection Printing · Resolution Enhancement techniques · Overlay-accuracies · Mask-Error enhancement factor (MEEF) · Positive and negative photoresists · Electron Lithography
Unit 3 · Short notes Tunnel junction and applications of tunneling Tunneling Through a Potential Barrier · Metal—Insulator, Metal-Semiconductor, and Metal-Insulator-Metal Junctions · Coulomb Blockade · Coulomb blockade in nanocapacitor · Tunnel Junctions · Tunnel Junction Excited by a Current Source
Unit 4 · Short notes Field Emission, Gate—Oxide Tunneling and Hot Electron Effects in nano MOSFETs Field Emission · Gate—Oxide Tunneling · Hot Electron Effects in nano MOSFETs · Theory of Scanning Tunneling Microscope · Double Barrier Tunneling and the Resonant Tunneling Diode · Nanoscale MOSFET, FinFETs, charge and energy quantization in Single electron devices
Unit 5 · Short notes Scaling of physical systems – Geometric scaling & Electrical system scaling, Introduction to MEMS and NEMS Geometric scaling · Electrical system scaling · Introduction to MEMS and NEMS · Micro sensors (acoustic wave sensor, biomedical and biosensor, chemical sensor, optical sensor, capacitive sensor, pressure sensor and thermal sensor) · Micro actuation (thermal actuation, piezoelectric actuation)

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