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EC-702 (C) · Nano Electronics/Official Syllabus

Nano Electronics (EC-702 (C)) - Official Syllabus

1
Unit 1

Overview of semiconductor physics. Nanoscale band structure and Electron transport

  • Overview of semiconductor physics
  • Nanoscale band structure and Electron transport
  • Quantum confinement in semiconductor nanostructures
  • quantum wells
  • quantum wires
  • quantum dots
  • super-lattices
  • band offsets
  • electronic density of states
  • heavily doped semiconductors
  • low dimensional quantum devices
2
Unit 2

Introduction to lithography

  • Contact
  • proximity printing
  • Projection Printing
  • Resolution Enhancement techniques
  • overlay-accuracies
  • Mask-Error enhancement factor (MEEF)
  • Positive and negative photoresists
  • Electron Lithography
  • Direct writing
  • Electron resists
3
Unit 3

Tunnel junction and applications of tunneling

  • Tunnel junction and applications of tunneling
  • Tunneling Through a Potential Barrier
  • Metale28094Insulator, Metal-Semiconductor, and Metal-Insulator-Metal Junctions
  • Coulomb Blockade
  • Coulomb blockade in nanocapacitor
  • Tunnel Junctions
  • Tunnel Junction Excited by a Current Source
4
Unit 4

Field Emission, Gate-Oxide Tunneling and Hot Electron Effects in nano MOSFETs

  • Field Emission
  • Gatee28094Oxide Tunneling
  • Hot Electron Effects in nano MOSFETs
  • Theory of Scanning Tunneling Microscope
  • Double Barrier Tunneling
  • the Resonant Tunneling Diode
  • Nanoscale MOSFET
  • Finfets
  • charge and energy quantization in Single electron devices
5
Unit 5

Scaling of physical systems

  • Scaling of physical systems e28093 Geometric scaling
  • Electrical system scaling
  • Introduction to MEMS and NEMS
  • working principles, as micro sensors
  • acoustic wave sensor
  • biomedical and biosensor
  • chemical sensor
  • optical sensor
  • capacitive sensor
  • pressure sensor and thermal sensor
  • micro actuation (thermal actuation, piezoelectric actuation)

Reference Books

  • Microsystem Design — Stephen D. Senturia — Kluwer Academic Press
  • Fundamentals of microfabrication & Nanofabrication — Marc Madou
  • Micro Mechanical system Principle & Technology — T. Fukada, W. Mens — Elsevier
  • Micro sensors MEMS & Smart Devices — Julian W. Gardnes, Vijay K. Varma
  • Microlithography Science and Technology — James R Sheats, Bruce W. Smith — Marcel Dekker Inc.
  • Nano Technology and Nano Electronics e28093 Materials, devices and measurement Techniques — W.R. Fahrner
  • Fundamentals of Nanoelectronics — George W. Hanson — Pearson Education
  • Nano: The Essentials e28093 Understanding Nano Science and Nanotechnology — T. Pradeep — Tata McGraw Hill
  • Nanotubes and nanowires — C.N.R. Rao, A. Govindaraj — RSC Publishing
  • Quantum-Based Electronic Devices and Systems — M. Dutta, M.A. Stroscio — World Scientific
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